Courses Silicon Thin Film Transistors

Silicon Thin Film Transistors on Transparent and Flexible Substrate

June 11th - June 15th 2012 REGISTRATION

Université de Rennes


Université de Rennes

Today many works are devoted to produce flexible electronics. Major perspectives are flat and flexible screens, intelligent textiles and clothes, RFID labels able to replace the barcode identification system, and some biological applications such as bio-patches dedicated to be stuck on organs. The main goal of this training is to learn how to process on such flexible substrates. In that way, the practice consists in fabricating on flexible substrate and characterizing thin film transistor (TFT) that is the elementary element of any electronics.

This course fulfills all the criteria imposed by the FP7 EURO-DOTS program, and has been provisionally granted the EURO-DOTS label. PhD students fulfilling the requirements can apply for a scholarship. Details on the FP7 EURO-DOTS program, these requirements and the application procedure can be found on Students >> Rules.


The course is primarily aimed to PhD students and researchers from European Universities and Research Institutes who want to learn or increase their skills on the microelectronic technology on flexible substrate. Professionals from European Companies that have the same need are also welcome. Due to the limiting possibilities in the clean room, the maximal audience is limited to a minimum of 4 attendees and a maximum of 8 attendees.



The course will take place at Université de Rennes

Bâtiment 11D
Avenue Jean Perrin
Campus de Beaulieu
35042 Rennes Cedex


Attendance is kept low in order to lower the barrier for members of universities and research institutes. However, a fee will be required to cover a small part of the known high cost of the technology.
  • Attendance fee : 1 000 € for PhD students.
  • Fees exclude VAT which will be invoiced subject to national regulations.
  • Fees include the lecture and the attendance to the training in the clean room, all the materials needed for the lecture and the training, the five days lunches and refreshment breaks, and the social event dinner
  • Fees include also a help for lodging arrangements in the University at moderate cost.
  • Transport, accommodation and other meals are not included in the fees.


The training starts with 3 hours lecture on the technological steps regarding the low temperature need and on the expected influence of the flexibility of the substrate on the TFT’s properties. Then the practical training is divided into partsTFTs are processed in clean room, directly on transparent plastic substrate at a maximum temperature of 180°C, compatible with the m echanical properties of the substrate. The training is divided in several technological and analysis parts listed below:
  • PECVD Deposition: undoped microcrystalline silicon, N or P doped microcrystalline silicon, silicon nitride
  • E-beam deposition of metals
  • 4 photolithography steps (4 mask levels)
  • Electrical and Physical characterizations during the process:
    • ellipsometry
    • 4-probes resistivity
    • I-V and C-V characteristics
  • Electrical characterizations after the process:
    • TFT’s parameters analysis (Agilent B1500)
    • Study of the effect of the flexibility of the substrate



©EURO-DOTS 2011 - Disclaimer


Important message to the PhD students interested in a EURO-DOTS scholarship!!!

Unfortunately today, on January 15 2015, the EURO-DOTS project has come to an end and no more scholarships can be granted for the time being.

Status EURO-DOTS on 15 January 2015

The EURO-DOTS-2 project has come to an end on 31 December 2014. At this moment there is no prospect about a possible continuation of this initiative, in spite of the huge success of the project and the ambition of the consortium to continue on this path. The success of the past actions cannot be better reflected  than by the more than 220 testimonials (Testimonials) of students whom were granted a EURO-DOTS scholarship in the past 4 years. In these 4 years of EURO-DOTS, 132 course modules have been organized on 61 relevant topics/themes, by 20 course providers from 11 countries. More than 250 lecturers have been involved. More than 300 PhD students, from 19 European countries, have successfully applied for a scholarship. In 2014 40 Courses have been scheduled. The calendar and information on all past courses can be found on Courses. For more up-to-date information on the realizations and conclusions of EURO-DOTS, please go to “EURO-DOTS Conclusions” on Final Reports. The consortium is considering possible actions to keep the EURO-DOTS mission alive and hopefully see the start of a next phase of EURO-DOTS.

EURO-DOTS Testimonials by students

More than 170 testimonials by students can be found on Testimonials of students. We invite you to read through these messages and by these be convinced of the benefit to PhD students of an initiative and project like EURO-DOTS!

EURO-DOTS Testimonials by Course Providers

Five Course Providers share their enthusiasm on the EURO-DOTS initiative and explain why they decided to contribute and be part of the game. You can find their testimonial on Testimonial of Course Providers

EURO-DOTS flyer and poster

The latest version of the EURO-DOTS flyer and poster can be downloaded from the PR and Dissemination section.